FEATURES
  ⊙ Class 1 clean room environment comply.
  ⊙ Meets various user requirements with fast delivery.
  ⊙ Fleid proven motion control technology enables highest uptime.
  (single, dual and dump end-effector / telescopic vertical motion mechanism available)
  ⊙ High stiffness with minimum weight using optimum structure design.
  ⊙  Expandable up to 5 axes.

TM & LL FEATURES




SPECIFICATION