FEATURES
⊙ Supports glass cassette of 4th ~8th generation
⊙ High stiffness arm structure against light weight
⊙ High throughput through optimal motion control
⊙ High reliability, productivity, precision
⊙ Easy maintenance
⊙ Low noise level
⊙ High stiffness arm structure against light weight
⊙ High throughput through optimal motion control
⊙ High reliability, productivity, precision
⊙ Easy maintenance
⊙ Low noise level
SPECIFICATION
