FEATURES
- Application for Cluster Tool(8G) / CVD, PE-CVD, Etcher, etc
- High temp. compatible
- Monitoring for motor torque & temperature available
- High rigidity through link mechanism on arm
- Low gas emission by eliminating belt drive in vacuum environments.
- Sensors for substrate detection can be wired internally.
- Magnetic seal used for all drive in vacuum environments
- High temp. compatible
- Monitoring for motor torque & temperature available
- High rigidity through link mechanism on arm
- Low gas emission by eliminating belt drive in vacuum environments.
- Sensors for substrate detection can be wired internally.
- Magnetic seal used for all drive in vacuum environments
SPECIFICATION
