FEATURES
⊙ Type : Single arm(3 axis) / dual arms(4 axis)
⊙ High Throughput ( Swap time )
⊙ Proven 4-bar link arm [ Particle free ]
⊙ High Rigidity ( Sag & Wobble )
⊙ AWC function available (Auto Wafer Centering)
⊙ High Throughput ( Swap time )
⊙ Proven 4-bar link arm [ Particle free ]
⊙ High Rigidity ( Sag & Wobble )
⊙ AWC function available (Auto Wafer Centering)
Detailed Product Description
SPECIFICATION