FEATURES
⊙ High throughput & reliability using 7 axis vacuum robot
⊙ Quard Arm (4 Hands Wafer handling)
⊙ Individual controlled 4 arms
⊙ AWC function available (Auto Wafer Centering)
⊙ UPEH 250 wafers/hr
⊙ Quard Arm (4 Hands Wafer handling)
⊙ Individual controlled 4 arms
⊙ AWC function available (Auto Wafer Centering)
⊙ UPEH 250 wafers/hr
SPECIFICATION
